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이종접합 CdTe/CdS 박막의 광학 및 전기적 특성 최적화

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Author(s)
양정태
Issued Date
2010
Abstract
Thin-film cadmium telluride (CdTe) solar cell technology can theoretically improve the conversion efficiency and production costs of conventional silicon solar cell technology. Due to the optimal band gap energy (about 1.4 eV) for solar energy absorption, high light absorption capability and lower cost requirements for solar cell production, CdTe have been widely researched as being suitable for commercial cell production.
The effects of the processing conditions on the thickness-uniformity and surface-morphology of the CdTe thin-films were investigated using atomic force microscope (AFM) and ellipsometry for large-area solar cells. The photovoltaic properties of CdTe thin films were analyzed in relation to the different thickness-uniformity and surface morphology caused by the various process conditions. The thickness-uniformity, which was controlled by the process conditions in the sputtering process, affected the photovoltaic properties of the sputtering deposited CdTe thin films. Higher carrier concentration and better optical absorbance were obtained in CdTe thin films with a good thickness-uniformity.
As the effects of thickness-uniformity on the photovoltaic characteristics for the large-area CdTe thin film solar cell, chemical mechanical polishing (CMP) process was investigated for an enhancement of thickness-uniformity. Removal rate of CdTe thin film was more affected by the down force than the table speed. RMS roughness and peak-to-valley roughness of CdTe thin film after CMP process were improved to 96.68% and 85.55%, respectively. The optimum process condition was estimated by 100 gf/㎠ of down force and 60 rpm of table speed with the consideration of good removal uniformity about 5.0% as well as excellent surface roughness for the large-area CdTe solar cell.
Cadmium sulfide (CdS) is widely used material as a window layer with either CdTe or copper indium selenide (CuInSe2) in the heterojunction thin film solar cells. The phase structure and grain size of CdS thin films were changed as changing the annealing temperature, and then the electrical properties including resistivity and the optical properties were influenced by them. The improved optical transmittance of 72.25% (at average thickness of 843.93 nm and the optical band gap energy of 2.43 eV) was obtained compared to the as-deposited CdS thin films at the annealing temperature of 400℃ because of the decrease in the defect density caused by the annealing process. This temperature was selected for the optimized condition considering to both the electrical properties (resistivity not exceeding 103–order Ωcm) and optical characteristics including transmittance.
In this thesis, the thickness uniformity of CdTe thin films was the main point for the energy conversion efficiency and the optimum annealing temperature of CdS thin films was 400℃ for the excellent thin film characteristics. For the application to the large-area thin film solar cells, the improvement of the thickness uniformity in the preparation of CdTe thin films was strongly necessary; therefore, CMP process was firstly employed and the enhanced characteristics were successfully obtained. The optimized optical and electrical characteristics of CdTe/CdS heterostructured thin film solar cells could be achieved considering the optical and electrical properties through these results.
Alternative Title
Optimization of Optical and Electrical Characteristics of Heterojunctioned CdTe/CdS Thin Films
Alternative Author(s)
Yang, Jung Tae
Affiliation
조선대학교 대학원
Department
일반대학원 전기공학
Advisor
이우선
Awarded Date
2010-08
Table Of Contents
목 차

ABSTRACT

I. 서 론 1
A. 연구의 필요성 1
B. 연구의 배경 4
C. 연구 목적 8

II. 박막 태양전지 9
A. 태양전지 9
1. 태양전지 동작원리 및 구조 9
2. 태양전지 기술 분류 15
B. 박막 태양전지 20
1. 실리콘 박막 태양전지 21
2. CIGS 박막 태양전지 25
3. CdTe 박막 태양전지 32

III. CdTe/CdS 박막 증착 및 표면 개질 공정 36
A. 스퍼터링 공정 36
B. 화학적 기계적 연마 (CMP) 공정 39
1. CMP 공정의 원리 39
2. CMP 공정의 개요 49
3. CMP 공정 변수 51

IV. 실험 55
A. 박막 증착 공정 55
1. CdTe 박막 55
2. CdS 박막 59
B. 화학적 기계적 연마(CMP) 공정 60
C. 측정 및 분석 공정 62
1. 두께 측정 62
2. 박막의 표면 형상 특성 65
3. CdS 박막의 결정학적 특성 66
4. CdTe/CdS 박막의 광 특성 67
5. CdTe/CdS 박막의 전기 특성 68

D. 균일도와 표면 형태의 전기적 특성 69
E. 열처리 조건에 따른 표면, 구조, 전기 및 광학 특성 100
F. 대면적 CdTe 박막의 연마 공정 특성 118



V. 결 론 129

참고문헌 131
Degree
Doctor
Publisher
조선대학교 대학원, 조선대학교 공과대학원
Citation
양정태. (2010). 이종접합 CdTe/CdS 박막의 광학 및 전기적 특성 최적화.
Type
Dissertation
URI
https://oak.chosun.ac.kr/handle/2020.oak/8768
http://chosun.dcollection.net/common/orgView/200000240230
Appears in Collections:
General Graduate School > 4. Theses(Ph.D)
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