페롭스카이트Sr(Ti1-xFex)O3-δ물질을 이용한 산소센서 및 모듈 연구

Abstract

Planar sensor of SrTi1-xFexO3-δ, x= 0.4 and 0.6, with perovskite structure was fabricated on alumina substrate using thick film technology. Electrical resistance was measured as a function of thermal treatment conditions, atmosphere, time and temperature. Sensing property was also measured as a function of temperature and the gases of O2, CH4, CO, CO2, NO and NO2. The resistance of SrTi1-xFexO3-δ is lower than those of SrTiO3 or SrFeO3. TCR(temperature coefficient of resistance) of zero over 550oC was measured for the composition of SrTi1-xFexO3-δ after thermal treatment at 1100oC in air only. The perovskite SrTi1-xFexO3-δ didn't show any response to CH4, CO, CO2, NO and NO2, but an excellent response and recovery characteristics with oxygen concentration