포토리소그래피 공정이 없는 OLED 조명소자 제작

Abstract

Fabrication of OLED lighting devices which is considered as a next generation solid-state lightings, consists of 4 major parts, formation of pattern, organic thin film deposition, encapsulation and assemble of module. First of all, photo-lithography process for defining ITO patterns requires high amounts of investments and process time. So then, if OLED lighting devices can be fabricated using in-line process without photo-lithography, the process cost can be reduced by half compared with conventional process. The fabrication technology without photo-lithography has several advantages such as simple process flow and no clean room facilities and no investment for new equipments which allows to be fabricated utilizing conventional facilities. In this thesis, I would like to introduce new OLED lighting fabrication technology without photo-lithography in detail. Using this technology, ITO thin flim was deposited on metal mask by in-line sputtring method, and their characteristics was evaluated by OLED lighting devices. The fabricated OLED lighting devices exhibited good light emission properties without degradation.