초음파를 이용한 초정밀 부품 부상 이송 시스템에 관한 연구

Abstract

The object transport system is used in many industry field such as the conveyor belt, which transports huge goods in container harbor, the magnetic levitation system, and the indexing system which transports precision components such as semiconductor and optical component. It is a indispensable device for many fields and especially it is very important in the factory automation. From 1990s, as the information and telecommunication industry starts to develope, the semiconductor and the optical industry are growing. In recent years, the faster network is required, the more demand of optical components is growing. The conventional transport system is not, however, adequate for·transporting the precision optical components and semiconductors. The reason is that the transport systems like conveyor belt can damage precision optical components by the contact force and magnetic systems can destroy the inner structure of semiconductor by magnetic field. In this reason, the new system for transporting optical components and semiconductor without damage is required. The system using ultrasonic wave is the one of alternatives. It can transport precision elements such as semiconductor and optical lens without damage. In this thesis, the levitation transport of precision element using ultrasonic wave is developed for transporting the optical lens and semiconductor disk without damages, and the 3 experiments are performed for evaluating the developed system. In the first experiment, the optimal traveling frequency to generate traveling wave on the each flexural beams and transport the each optical lenses are acquired. It was checked with 2 experimental conditions such as the stable transportation and the zero speed that the transport mechanism and the vibration modes of flexural beam using Laser Scanning Vibromter. As a result, the relationship between transporting characteristics and flexural beam shapes are verified. In the second experiment, the semiconductor disk levitation heights and transportation speed in the each flexural beam are measured. The horizontal and vertical vibration characteristics are measured by Laser Scanning Vibrometer. As a result, the relationship levitation and transporting characteristics according to flexural beam shapes are verified. The third is to design the automatic optical elements pickup system for transporting optical lens. Pickup system works automatically to pick up the injected optical lens and to test its defect. Visual C++ is used for controlling the pickup system. Pickup apparatus is simulated the continuous motion by Adams.