공명초음파법을 이용한 광소자 부품의 결함평가

Abstract

The objectives of the paper is to proposed a non-destructive sorting technology by Resonant Ultrasound Spectroscopy. For research, we made of the measuring NDT system by RUS. The principle of RUS is that the mechanical resonant frequency of the materials depends on density, and the coefficient of elasticity. The RUS system is the measuring which is to exite specimen and to inspect the difference of natural frequency pattern between acceptable specimen and specimen which has some defects. we evaluate the crack in a ceramic ferrule and the flaw in an Optical lens by RUS system. Then, we carried out simulation by explicit finite elements method, and compared the experimental results with simulation results for verify the data obtained from the experiment. Also, we compared the resonant frequencies of specimens with some defect with those of acceptable specimens. The histogram drawn from these data and the available resonance mode surveyed were used to classify the acceptable specimens in the plant.