LED용 ZnO 투명산화물 전극의 특성향상
- Author(s)
- 박세연
- Issued Date
- 2006
- Abstract
- Recently a number of researches have been carried out on transparent conducting oxide (TCO: ITO, ZnO) to replace metal electrode (Au/Ni) for enhancing the light extraction efficiency of LED. In this study, after co-doping Al and Ga to ZnO, the optical and electrical properties were investigated. The LED devices were fabricated using Al and Ga co-doped ZnO thin films for TCO. ZnO thin film was deposited on a (001) sapphire substrate by RF magnetron sputtering system at room temperature. The thickness of the ZnO thin film was kept to 270 nm.
Resistivity and sheet resistance at room temperature were 4x10^(-4) Ωcm and 26 Ω/□, respectively. Transmittance at the visible wavelength range was more than 90%. voltage was5.8 V at 20 mA current. EL intensity of the LED device with ZnO TCO increased by 40% compared to that of Ni/Au. These electrical and optical properties suggest that ZnO is a potential candidate for transparent conducting oxide for LED applications.
- Alternative Title
- Improvement of characteristics of ZnO Transparent conducting oxide for LED applications
- Affiliation
- 조선대학교 대학원
- Department
- 일반대학원 첨단소재공학과
- Awarded Date
- 2006-02
- Table Of Contents
- 목차 = I
LIST OF TABLES = III
List of Figures = IV
ABSTRACT = VI
제1장 서론 = 1
제2장 이론적 배경 = 3
제1절 ZnO (Zinc Oxide) = 3
1.1 ZnO의 물리적 성질과 구조 = 3
제2절 LED (Light Emitting Diode) = 7
2.1 LED란? = 7
2.2 LED의 특징 = 11
제3절 TLM (Transmission Line Method) = 12
3.1 TLM을 이용한 오믹 접촉 비저항 = 12
제4절 Hall effect = 16
4.1 Hall effect의 원리 = 16
4.2 Van der Pauw law = 19
4.3 Hall 계수와 Hall 이동도 측정법 = 22
4.4 RF-Magnetron Sputtering 장치 = 24
제3장 실험 방법 = 27
제3.1 절 LED 소자 제작 = 27
3.1.1 Target 제작 = 27
3.1.2 기판세척과정 = 31
3.1.3 ZnO 증착 = 31
3.1.4 에칭 = 33
3.1.5 금속전극 증착 = 36
3.1.6 Lift-off = 36
3.1.7 후열처리 조건 = 36
제3.2절 특성 분석 = 37
3.2.1 전기적 특성 조사 = 37
3.2.2 광학적 특성 조사 = 37
3.2.3 구조적 특성 조사 = 37
제4장 결과 및 고찰 = 38
4.1 전기적 특성 = 38
4.2 구조적 특성 = 44
4.3 광학적 특성 = 46
4.4 후열처리에 따른 접촉 저항 = 52
4.5 소자 특성 = 54
제4절 결론 = 58
참고문헌 = 59
- Degree
- Master
- Publisher
- 조선대학교
- Citation
- 박세연. (2006). LED용 ZnO 투명산화물 전극의 특성향상.
- Type
- Dissertation
- URI
- https://oak.chosun.ac.kr/handle/2020.oak/6053
http://chosun.dcollection.net/common/orgView/200000231613
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