레이저 스페클 간섭법을 이용한 면내변위 측정시스템 개발

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As researches on speckle interferometry made use of the laser's time and space interference characteristic are continuously developed, those researches are actively studying at home and abroad in these days.
Speckle interferometry makes it possible to test a source of light on the whole measuring surfaces and real-time inspection as well as inspect the measurement of the shapes, stress and displacement which is studied in this paper on the whole measuring surface.
According to the shape of structure, speckle interferometry is feasible to use the measurement of In-plane or Out-of-plane displacement, analysis of remaining stress in the thin film, and analysis of vibration mode by the change of frequency.
As is explained above, because the measurement method using Laser Speckle Interferometry is capable of highly sensitive and resolving power measurement with non-contact, full-field, and real-time measurement, application of the measurement method using speckle interferometry is on increase.
But, recently donation application technology only reach the level to compose the optical interferometer by optical experts or to apply the a high price commercial equipment purchased from abroad. In spite of a lot of advantages technical impact is insufficient.
For solving these problems, in this thesis, we develop the micro optical interference sensor and analysis program to enhance the application as the measurement equipment.
In this paper, micro optical interferometer consists of sensor form that analyzes optical measurement mechanism of inner surface displacement interferometer and we developed analysis program applied for phase transfer technique for qualitative analysis of speckle interference pattern.
Alternative Title
The Development of In-Plane Displacement Measurement System on Laser Speckle Interferometry
Alternative Author(s)
Yoon, Hong seok
朝鮮大學校 大學院
일반대학원 기계설계공학과
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Table Of Contents
제 1 장 서론 = 1
제 2 장 이론 = 3
제 1 절 스페클 상관 간섭법 = 3
1. 스페클 형성과 크기 = 3
2. 스페클 상관 간섭무늬의 형성 = 7
3. 물체의 변형정보 추출 = 10
가. 위상이동기법(Phase Shifting Method) = 11
나. 결펼침(Unwrapping) = 13
제 2 절 측정시스템의 측정감도 분석 = 14
제 3 절 광학 간섭계 = 17
1. 면외변위 측정간섭계 = 17
2. 스페클 전단간섭계 = 18
3. 면내변위 측정간섭계 = 22
가. 광경로 추적을 통한 변위측정 = 22
나. 간섭무늬로부터 위상추출 = 25
제 3 장 In-Plane 측정 개발시스템 구성 및 실험방법 = 27
제 1 절 In-Plane 측정 개발시스템 구성 = 27
제 2 절 실험방법 = 31
제 4 장 실험결과 및 고찰 = 33
제 5 장 결론 = 47
참고문헌 = 48
Appendix = 50
朝鮮大學校 大學院
尹洪碩. (2005). 레이저 스페클 간섭법을 이용한 면내변위 측정시스템 개발.
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General Graduate School > 3. Theses(Master)
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