레이저 스페클 간섭법을 이용한 면내변위 측정시스템 개발

Abstract

As researches on speckle interferometry made use of the laser's time and space interference characteristic are continuously developed, those researches are actively studying at home and abroad in these days. Speckle interferometry makes it possible to test a source of light on the whole measuring surfaces and real-time inspection as well as inspect the measurement of the shapes, stress and displacement which is studied in this paper on the whole measuring surface. According to the shape of structure, speckle interferometry is feasible to use the measurement of In-plane or Out-of-plane displacement, analysis of remaining stress in the thin film, and analysis of vibration mode by the change of frequency. As is explained above, because the measurement method using Laser Speckle Interferometry is capable of highly sensitive and resolving power measurement with non-contact, full-field, and real-time measurement, application of the measurement method using speckle interferometry is on increase. But, recently donation application technology only reach the level to compose the optical interferometer by optical experts or to apply the a high price commercial equipment purchased from abroad. In spite of a lot of advantages technical impact is insufficient. For solving these problems, in this thesis, we develop the micro optical interference sensor and analysis program to enhance the application as the measurement equipment. In this paper, micro optical interferometer consists of sensor form that analyzes optical measurement mechanism of inner surface displacement interferometer and we developed analysis program applied for phase transfer technique for qualitative analysis of speckle interference pattern.