이황화 몰리브덴을 이용한 이산화탄소 감지 센서에 관한 연구
- Author(s)
- 신현식
- Issued Date
- 2024
- Abstract
- Study on Carbon Dioxide Detection Sensors using Molybdenum Disulfide Hyun-sik Shin Advisor : Prof. Min Ki Kwon, Ph.D. Department of Photonic Engineering Graduate School of Chosun University In this study, we proposed, investigated, and evaluated the development of a CO2 gas sensor made of functional nanomaterials to monitor CO2 gas emitted during human respiration. We used two-dimensional nanomaterials as a process to improve the performance of gas sensors, found conditions in the environment that could be variables in the performance of the sensor, and used the processes of sputtering (PVD) and hydrothermal synthesis. By comparing and analyzing the proposed sensors, the capabilities of the gas sensor were evaluated through various variable conditions (ratio, temperature, time, doping, and wavelength). Through the doping process, the sensitivity of the 2D TMDc-based gas sensor was improved by changing the bandgap of the existing MoS2 material, and the difference in response time and current value when a wavelength was applied under carbon dioxide conditions was improved. Finally, a sensor based on Au/Nb/MoS2 was manufactured, and the wavelength was applied to a non-contact CO2 material to improve sensitivity and expand the responsiveness of the sensor. These results show that MoS2-based sensors of 2D TMDc materials will be used in the future. It shows that it can be expanded by being applied to various industrial fields, optical and agricultural sensors The chemical sensing applications of IoT have garnered significant attention for the real-time detection of environmental pollutants, which is crucial not only for the medical diagnosis of various diseases but also for taking preventive measures. Although diverse sensor types have been developed and implemented, they often face challenges such as slow responsiveness, limited detection ranges, chemical instability, bulky sizes, high power consumption, and persistently high costs. Recently, 2D nanomaterials with semiconductor characteristics, such as TMDs (Transition Metal Dichalcogenides), have emerged as an alternative solution. Their attributes including low power consumption, high mobility of charge carriers, lightweight nature, high stretchability, reliable mechanical strength, excellent optical transparency, and outstanding environmental stability make them excellent candidates for flexible devices. Particularly, the large surface-to-volume ratio of 2D materials has gained attention in chemical sensing applications. However, there's been substantial research on highly reactive gases like moisture, ammonia, and NO2. In contrast, there's a scarcity of research concerning the detection of carbon dioxide (CO2), which is highly demanded in various fields like healthcare, air purification, and smart agriculture. In this study, we aimed to enhance the performance of CO2 sensors utilizing the 2D nanomaterial MoS2. We grew MoS2 thin films using various synthesis methods such as sputtering (PVD) and hydrothermal synthesis, and endeavored to improve reactivity through various process parameter conditions (ratios, temperatures, times, doping). These outcomes demonstrate the potential utilization of MoS2-based sensors using 2D TMDc materials for CO2 detection across various fields. This suggests the possibility of extending their application not only to diverse industrial sectors but also to optical and agricultural sensors.
- Alternative Title
- Study on Carbon Dioxide Detection Sensors using Molybdenum Disulfide
- Alternative Author(s)
- Shin hyun sik
- Affiliation
- 조선대학교 일반대학원
- Department
- 일반대학원 광기술공학과
- Advisor
- 권민기
- Awarded Date
- 2024-02
- Table Of Contents
- ABSTRACT
제1장 서론 1
제2장 이론적 고찰 2
제1절 센서의 목적 및 응용 2
1. 기술의 다양성 2
2. 센서의 이차원 나노물질의 이점 6
제2절 Semiconductor 개요 및 소자 10
1. 반도체(Semiconductor) 10
1.1. 개요 10
2. 다이오드(diode)의 원리 11
3. 트랜지스터 (Transistor)의 원리 14
3.1. BJT (Bipolar junction Transistor) 14
3.2. FET (Field-effect Transistor) 15
3.3. TFT (Thin film Transistor) 18
4. 반도체 공정 과정 19
제3절 2D nano material의 소재 및 결합 21
1. MoS2 (Molybdenum Disulfide) 21
2. Van der Waals Force (반데르발스 힘) 22
제4절 PL, Raman Spectrum의 측정 26
1. PL 26
2. Raman Specturm 27
제5절 Ohmic, Schottky Contact 구조 및 영향 28
1. Ohmic Contact 28
2. Schottky Contact 29
제3장 실험방법 및 결과 30
제1절 PVD[Physical Vapor Deposition, Sputtering] ·30
1. 물리기상증착법으로 제작된 이차원 나노물질 코팅 방법 30
2. 가스 센서 제작과정 및 매커니즘(Mechanism) 32
3. 스퍼터링의 변수 조건 35
3.1. 기판 온도 변화에 따른 MoS2 박막 합성 및 CO2 반응성 35
3.2. 인가 전력 변화에 따른 MoS2 박막 합성 및 이를 이용한 CO2 반응성 40
3.3. 성장 시간 변화에 따른 MoS2 박막 합성 및 이를 이용한 CO2 반응성 44
제2절 수열합성(Hydrothermal Synthesis) 51
1. 이차원 나노물질(수열 합성을 이용한 MoS2) 합성 방법 51
2. 수열 합성된 MoS2를 이용한 CO2 센서 제작 53
3. 수열합성 온도 변화에 따른 MoS2 박막의 합성 및 CO2 반응성 분석 54
4. 수열 합성 시 MoS2 질량비에 따른 MoS2 박막의 합성 및 이를 이용한 센서의 CO2 반응성 58
5. 수열합성 시간에 따른 MoS2 박막의 합성 및 이를 이용한 센서의 CO2 반응성 60
6. 교반 유, 무에 따른 MoS2 박막의 변화와 이를 이용한 센서의 CO2 반응성 63
제3절 n형, p형 도핑에 따른 MoS2 박막을 이용한 센서의 CO2 반응성 66
1. BVD(Benzyl viologen dichloride, N-Type)를 이용한 MoS2 박막의 n형 도핑 및 이를 이용한 센서의 CO2 반응성 66
2. Nb(Niobium, P-Type) 이용한 MoS2 박막의 n형 도핑 및 이를 이용한 센서의 CO2 반응성 69
제4장 결론 76
[참고문헌] 77
- Degree
- Master
- Publisher
- 조선대학교 대학원
- Citation
- 신현식. (2024). 이황화 몰리브덴을 이용한 이산화탄소 감지 센서에 관한 연구.
- Type
- Dissertation
- URI
- https://oak.chosun.ac.kr/handle/2020.oak/18027
http://chosun.dcollection.net/common/orgView/200000720388
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