분광타원계 적용을 위한 광대역 보정기 개발에 관한 연구

Abstract

A study on the Development of a Broadband Compensator for Spectroscopic Ellipsometry Applications By Haehyuck Kwon Advisor : Prof. Jong-Rak Park, Ph.D. Department of Photonic Engineering Graduate School of Chosun University In this paper, a study on the development of a broadband compensator for spectroscopic ellipsometry applications was conducted. We proposed a structure for a broadband compensator using a combination of a half-wave plate and a quarter-wave plate. Simulations were performed to explore various combinations of rotation angles for the half-wave plate and the quarter-wave plate, enabling the realization of the broadband compensator. The simulation results revealed that effective combinations of rotation angles can always be found for the range of the phase retardation error |∆|≤ pi/3 . The validity of the proposed structure was confirmed through a preliminary study using a homemade polarimeter. For this preliminary study, we employed a light source with a wavelength of 633 nm and utilized a half-wave plate and a quarter-wave plate made of SiO2 with a reference wavelength of 588 nm. Using a commercially available polarimeter, we experimentally demonstrated that the proposed structure could serve as a broadband compensator. To achieve this, experiments were conducted in the wavelength range of 500 nm to 800 nm. The combination of a half-wave plate and a quarter-wave plate made of SiO2 with a reference wavelength of 588 nm experimentally yielded Stokes vector components that closely agreed with the ideal Stokes vector components, showing a root mean square error of approximately 0.01 to 0.05. We anticipate that the structure, incorporating a combination of a half-wave plate and a quarter-wave plate as proposed in this study, can be effectively employed for the practical implementation of a broadband compensator in spectroscopic ellipsometry applications.