광간섭단층촬영을 이용한 부식된구리 산화층 비파괴 측정법 연구

Abstract

In this study, nondestructive analysis of the corroded copper oxidation using optical coherence tomography (OCT) as a high-precision depth profiling method for bio-medical applications is suggested. The corrosion copper specimen was subjected to vacuum heat treatment using a Chemical Vepor Deposition(CVD) equipment. Generally, light does not transmit into metals, but enables to transmit in metal oxidized layer induced by metal corrosions. It turns out that the thickness of the copper oxide layer can be measured with OCT technique. The longer wavelength of the light, the higher transmittance of the metal oxides, We used a swept source-OCT based on 1700 nm band tunable laser source. An optical coherence microscopy (OCM) measuring the depth profile of the samples more precisely thanOCT system was designed and developed. Interpolation and phase calibration were conducted to make the data of OCT and OCM better. To determine the thickness of the metal oxide from OCT depth images, a peak finding algorithm using MATLAB is developed. The measured thickness profiles of the copper oxide were agreement with the thickness measured from SEM images of the corroded metals.