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이황화 몰리브덴을 이용한 웨어러블 호흡 센서 연구

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Author(s)
김은진
Issued Date
2022
Keyword
Wearable, Molybdenum dusulfide, Respiration sensor
Abstract
Recent research on u-Health, which can check and manage one's health condition anytime, anywhere, is being actively conducted, as interest in personal health management has rapidly expanded due to the advent of IT. Research into monitoring biosignals by merely wearing or attaching them to the body is becoming increasingly popular. As a result, future electronics will take the shape of wearable devices, particularly accessories like basic watches that may be connected to the skin in a flexible form. To do so, a gadget that can swiftly identify and evaluate a large amount of data is required.
One of the most significant physiological characteristics of life is human breath, which gives valuable information regarding cardiac and pulmonary problems. Breath monitoring is useful for determining the health of the human body by recording physical parameters of the breath such as breath frequency and tidal volume. Electronic and pressure-detecting breath sensors are the most common commercially available breath sensors.
Because of their mechanical, chemical, and electrical properties, two-dimensional (2D) nanomaterials like Transition Metal Dichalcogenides (TMDs) attract attention. Because of its piezoelectric capabilities, electrical qualities, outstanding on/off ratio, high mechanical strength, flexibility, and compatibility with flexible substrates, Molybdenum disulfide (MoS2) was chosen among the 2D layered materials. However, there are just a few studies on respiratory sensors.
Chemical vapor deposition technologies were used to successfully build ultrahigh sensitive respiration sensors based on MoS2. It is feasible to evaluate respiratory response by measuring humidity change throughout the breathing process. The effect of defect, strain, crystal structure, and quality on respiratory response has also been investigated. As a result, we discovered that MoS2 can be successfully employed as a real-time respiration sensor. The successful demonstration of an inexpensive MoS2-based humidity-based respiration sensor opens up new possibilities in flexible and wearable electronics.
Alternative Title
Study on wearable Respiration sensor based on molybdenum disulfide
Alternative Author(s)
Kim Eun Jin
Affiliation
조선대학교 일반대학원
Department
일반대학원 광기술공학과
Advisor
권민기
Awarded Date
2022-02
Table Of Contents
ABSTRACT

제1장 서 론 1

제2장 이론적 고찰 12
제1절 센서 기술과 응용 12
1. 센서 기술 12
2. 나노 반도체 기반 고감도 센서 17
제2절 반도체 (Semiconductor)의 개요 19
제3절 반도체 소자 22
1. 다이오드 (Diode)의 원리 22
2. 트랜지스터 (Transistor)의 원리 24
가. BJT (Bipolar junction Transistor) 24
나. FET (Field-effect Transistor) 26
다. TFT (Thin film Transistor) 28
제4절 이차원 물질 (2D material) 기반 반도체 소재 30
1. 그래핀 (Graphene) 31
2. 육방정계 질화붕소 (hexagonal boron nitride, h-BN) 32
3. 흑린 (Black phosphorus) 33
4. TMDs (Transition Metal Dichalcogenides) 34
가. MoS2 (Molybdenum disulfide) 35
나. MoS2 합성 방법 36

제3장 실험방법 및 결과 37
제1절 MoS2 박막 성장 38
1. 수열 합성법 (Hydrothermal)을 이용한 MoS2 합성 및 특성 분석 38
2. 화학기상증착법 (CVD)을 이용한 MoS2 성장 및 특성 분석 40
3. 수열 합성법과 화학기상증착법으로 성장 된 MoS2 특성 비교 44
제2절 MoS2 기반 호흡 센서 제작 50
1. 수열 합성법으로 합성된 MoS2 기반 호흡 센서 제작 50
2. 화학기상증착법으로 성장 된 MoS2 기반 호흡 센서 제작 51
제3절 MoS2 기반 호흡 센서 측정 55
1. 수열 합성법으로 합성된 MoS2 기반 습도 센서 특성 55
2. 화학기상증착법으로 성장 된 MoS2 기반 호흡 센서 특성 58
제4절 Flexible한 기판에서의 호흡 센서 제작 61
1. 플라스틱 기판에 직접 성장을 위한 저온 공정 61
2. 박막 이송 (Transfer)을 이용한 Flexible 센서구현 72
3. Flexible 기판에서의 MoS2 기반 호흡 센서 측정 73
제5절 제작된 호흡 센서 특성 비교 76

제4장 결론 77

[참고문헌] 78
Degree
Master
Publisher
조선대학교 대학원
Citation
김은진. (2022). 이황화 몰리브덴을 이용한 웨어러블 호흡 센서 연구.
Type
Dissertation
URI
https://oak.chosun.ac.kr/handle/2020.oak/17320
http://chosun.dcollection.net/common/orgView/200000591446
Appears in Collections:
General Graduate School > 3. Theses(Master)
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