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뜨거운 곁쌓기법에 의한 BaAl2S4 단결정 박막 성장과 광전기적 특성

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Author(s)
정경아
Issued Date
2016
Keyword
BaAl2S4 단결정 박막 성장, 광전기적 특성
Abstract
BaAl2S4는 Ⅰ-Ⅲ2-Ⅵ4족 화합물 반도체로서 상온에서 에너지 띠간격이 3.98 eV 인 직접 천이형 반도체이어서 광전소자[1], LED(light emitting diode)[2,5,7], 태양전지[3], 광전 메모리 소자[4], 등에 응용성이 기대되어 본 연구에서는 수평 전기로를 제작하여 6N의 Ba, Al, S 시료를 mole비로 칭량하여 수평로에서 용융 성장법으로 BaAl2S4 다결정을 합성하였다. 합성된 다결정은 XRD(X-ray diffraction)로부터 결정 구조 및 격자 상수를 확인하였으며, EDX(Energy Dispersive X-ray Spectrometer)를 이용하여 성분 및 조성비를 확인하였다. BaAl2S4 단결정 박막은 HWE 방법으로 합성된 BaAl2S4 다결정을 증발원으로 하여 반절연성(semi-insulate:SI) GaAs(100) 기판 위에 성장시켰다. BaAl2S4 단결정 박막의 결정성은 X-선 요동 곡선(double crystal X-ray rocking curve, DCRC)의 반폭치(FWHM)를 측정하여 알아보았다. 또한 BaAl2S4 단결정 박막의 광전기적 특성은 온도 변화에 따른 광전류(photocurrent)스펙트럼과 Hamilton matrix를 이용하여 가전자대의 결정장 상호작용(crystal field interaction)과 스핀-궤도 상호작용(spin-orbit coupling)에 의한 갈라짐(splitting) ΔCr과 ΔSo를 구하고, 광전류 봉우리들의 exciton 양자수 n 값을 알아보았다. 그리고 성장된 BaAl2S4 단결정 박막을 Ba, Al 및 S 증기 분위기에서 각각 열처리한 후 광발광 스펙트럼을 측정하고 분석하여 이러한 열처리 결과가 중성 주개에 구속된 exciton(D0, X)과 중성 받개에 구속된 exciton(A0, X)에 의한 복사 발광 봉우리 I2와 I1 및 SA emission에 어떤 영향을 미치는가를 연구하였다. 또한 BaAl2S4 단결정 박막을 광센서로 이용하기 위해 시료를 공기, Ba, Al, S 분위기에서 열처리하여 sensitivity(), photocurrent(pc)와 darkcurrnet(dc) 비, maximum allowable power dissipation(MAPD), response time(rise time, decay time)을 측정하여 광전소자 개발 가능성을 알아보았다.
Alternative Title
Opto-electrical Properties for BaAl2S4 single Crystal Thin Film Grown by Hot wall Epitaxy
Alternative Author(s)
Kyung a Jeong
Department
일반대학원 물리학과
Advisor
홍광준
Awarded Date
2016-08
Table Of Contents
ABSTRACT

Ⅰ. 서 론 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­1

Ⅱ. 이 론 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­4
A. 에너지 띠 구조 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­4
1. 전도띠 구조와 띠간격 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­4
a. 띠와 Kane 모형 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­4
b. 띠와 띠 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­7
2. 호울(Hole)띠의 구조 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­8
B. 전기수송이론 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­9
1. Boltzmann 전기수송방정식 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­9
2. 전기수송상수 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­11
a. 띠에 대한 수송상수 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­11
(1) 운반자 이동도 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­12
(2) Hall 계수 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­12
(3) Hall 산란인자 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­12
b. 다중띠 Hall 효과와 전기전도도 ­­­­­­­­­­­­­­­­­­­­­­­­­­­13
3. 산란기구 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­14
a. 띠에서의 산란 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­14
b. 및 띠에서의 산란 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­14
c. 호울(Hole)띠의 산란 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­14
C. 광발광 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­15
1. 발광성 재결합 과정 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­15
2. Exciton 재결합 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­17
a. 자유 exciton ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­17
b. Bound exciton ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­18
3. 띠간 재결합 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­19
4. 띠와 불순물간의 재결합 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­19
5. 주개-받개 쌍 재결합 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­21
6. Phonon ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­23
7. 깊은 준위에 의한 전이 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­23

Ⅲ. 실험 및 측정 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­25
A. 다결정 합성용 수평전기로 제작 ­­­­­­­­­­­­­­­­­­­­­­­­­25
B. BaAl2S4 다결정 합성 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­27
C. HWE에 의한 BaAl2S4 단결정 박막성장 ­­­­­­­­­­­­27
D. 결정구조 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­29
E. Hall 효과 측정 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­29
F. 광전류(Photocurrent) 측정 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­29
G. 광발광(Photoluminescence) 측정­­­­­­­­­­­­­­­­­­­­­­33
H. BaAl2S4 단결정 박막의 열처리 조건 ­­­­­­­­­­­­­­­­­35
I.광전도 셀 특성 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­36

Ⅳ. 실험 결과 및 고찰 ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­37
A. BaAl2S4의 결정구조 및 조성비 ­­­­­­­­­­­­­­­­­­­­­­­­37
1. BaAl2S4 다결정의 결정구조­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­ 37
2. HWE에 의한 BaAl2S4 단결정 박막의 성장 조건­­­40
3. BaAl2S4 박막의 화학 양론적 조성비 ­­­­­­­­­­­­­­­­­­­42
B. BaAl2S4 단결정 박막의 Hall 효과­­­­­­­­­­­­­­­­­­­­43
C.BaAl2S4 단결정 박막의 광흡수 스펙트럼과 광학적 에너지­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­ 46
D. BaAl2S4 단결정 박막의 광전류 스펙트럼 ­­­­­­­­­51
E. BaAl2S4 단결정 박막의 광발광­­­­­­­­­­­­­­­­­­­­­­­­61
1. As-grown BaAl2S4 단결정 박막의 PL 스펙트럼
­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­61
2. Ba, Al, S 분위기에서 열처리한 BaAl2S4 단결정 박막
의 PL 스펙트럼­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­64
F. 광전도 셀 특성­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­70
1. 감도() ­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­70
2. 최대허용소비전력(MAPD)­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­72
3. pc/dc­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­74
4. 응답시간­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­75

Ⅴ. 결 론­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­77

References­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­­80
Degree
Doctor
Publisher
조선대학교
Citation
정경아. (2016). 뜨거운 곁쌓기법에 의한 BaAl2S4 단결정 박막 성장과 광전기적 특성.
Type
Dissertation
URI
https://oak.chosun.ac.kr/handle/2020.oak/12898
http://chosun.dcollection.net/common/orgView/200000265673
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