디지털 홀로그래피 시스템을 이용한 첨단부품소재의 표면 형상 및 단차 측정

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digital holography, advanced component, step height, laser interferometer
Diversification and miniaturization made of high-tech parts and materials can be applied to various fields such as electronics, electricity to achieve the development of sustainable high technology. In addition to improved reliability, performance of these components, a variety of research and development can retain the competitiveness and cost-effectiveness compared to other ones. Consequently, NEMS and miniature painter composed of components with the technology of NEMS can improve the reliability, service life. also, it enables a non-destructive inspection we are handling to optimize performance of experiment. Now, we are continuing to carry out the research to get a reasonable result we hope. Therefore, In regard to digital holographic system, we will keep measuring the photolithography used in state-of-the-art components and materials in the semiconductor industry .
Semiconductor industry is one of key industries of Korea, which has continued growing showing a steady annual growth rate. Important technology for the semiconductor industry is high integration of devices. This is to increase the memory capacity for unit area, of which key is photolithography. The photolithography refers to a technique for printing the shadow of light lit on the mask surface on to wafer, which is the most important process in the semiconductor manufacturing process. In this study, width and step-height of the wafers patterned through this process were measured to ensure uniformity. The widths and inter-plate heights of the specimens patterned through the photolithographic process were measured using digital holography system. A digital holographic interferometer was configured, and nine (9) arbitrary points were set on the specimens as measurement points. The measurement of each point was compared with the measurements by a commercial device called Scanning Electron Microscope (SEM) and Alpha Step. The transmission digital holography has an advantage of short measurement time compared to other techniques and uses magnification lenses, allowing flexibility of changing between high and low magnifications. It is also possible non-contact, non-destructive measurement that does not damage the object. The test result confirmed that the digital holography system is a useful technique for measuring the patterns made using photolithography.
Alternative Title
Measurement of surface shape and step height of advanced components using digital holography system
Alternative Author(s)
Shin, Ju Yeop
조선대학교 기계시스템공학과
일반대학원 기계시스템
Awarded Date
Table Of Contents
목 차


제 1 장 서 론 1
제 1 절 연구 배경 1
제 2 절 연구 목표 및 내용 3

제 2 장 이론적 배경 4
제 1 절 디지털 홀로그래피 4
제 2 절 홀로그램의 재생 9
제 3 절 결펼침 12

제 3 장 실 험 15
제 1 절 디지털 홀로그래피 시스템 15
1-1. 반사형 홀로그래피 시스템 15
1-2. 투과형 홀로그래피 시스템 17
제 2 절 비교 측정 장비 19
2-1. FE-ESEM 19
2-2. Alpha step 20
2-2. AFM 21
제 3 절 시험편 22
3-1. Resolution Target 22
3-2. Photolithographic Product 23

제 4 장 실험결과 24
제 1 절 Resolution Target 24
1-1. Positive Resolution Target 24
1-2. Negative Resolution Target 26
제 2 절 Transmission-type Photolithographic Product 27
2-1. 투과형 홀로그래피 측정 27
2-2. FE-ESEM 측정 33
2-3. Alpha step 측정 36
2-4. Compare of Result 41
제 3 절 Reflection-type Photolithographic Product 42
3-1. 반사형 홀로그래피 측정 41
3-2. FE-ESEM 측정 51
3-3. AFM 측정 54
3-4. Compare of Result 59

제 5 장 결론 60
참 고 문 헌 61
조선대학교 대학원
신주엽. (2016). 디지털 홀로그래피 시스템을 이용한 첨단부품소재의 표면 형상 및 단차 측정.
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General Graduate School > 3. Theses(Master)
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