플렉시블 기판용 TIZO/Ag/TIZO TCO박막의 전기적, 광학적 특성

Abstract

Multi-layer transparent films with lower electrical resistances than the widely used transparent conductive electrodes, were prepared at room temperature on flexible poly ether sulfone (PES) substrates by RF magnetron co-sputtering system. The multi-layer structure of films consisted of three layers, titanium indium zinc oxide TIZO/Ag/TIZO. Optical and electrical properties of multi-layer structures were investigated with the thickness of each TIZO/Ag/TIZO layer. Transparent and conductive film with the sheet resistance of 7.7 ohm/sq and the average transmittance of 92% at 550 nm, was obtained at the thickness of TIZO(40 nm)/Ag(10 nm)/TIZO(100 nm)/PES. The surface roughness RRMS values of the obtained TIZO/Ag/TIZO multi-layer films were below 1 nm. Overall, the properties of the TIZO/Ag/TIZO multi-layer film were comparable or superior to those of the other multi-layers such as indium tin oxide ITO/Ag//ITO, indium zinc oxide IZO/Ag/IZO, and indium zinc tin oxide IZTO/Ag/IZTO, and thus TIZO/Ag/TIZO multi-layer may serve as a viable, high-efficient alternative for electrode applications in flexible photovoltaic cells and flat panel displays.