나노 가공을 위한 듀얼서보 시스템과 건식냉각 시스템에 관한 연구

Abstract

In the current high precision processing machine As the diameter of the workpiece that can be machined increases, the machining precision increases. According to the trend, the stroke distance of each slide Despite relatively longer nm levels High resolution and high exercise precision are required over the entire exercise section. In this case, however, the inertial mass of the conveying part is very large. In order to compensate for the movement error in real time, the response speed is absolutely This makes it very difficult to compensate for real-time exercise errors. This improves the Forced to improve of each component. This Since there is no choice but to increase the manufacturing cost of the processing machine is bound to have a limit of processing precision. Therefore, this paper developed the Dual Servo System to meet the demands of the industry, improve the precision of the machine and reduce the manufacturing cost, thereby real-time correction of the error value generated in the feed system and fine control of the cutting tool to establish the processing technology and to establish the roughness of the processing surface according to the processing heat generated in the nm processing.